Roland Telfeyan

Publications & Conference Proceedings

  1. D. Boning, W. Moyne, T. Smith, J. Moyne, R. Telfeyan, A. Hurwitz, S. Shellman, and J. Taylor (1996). ``Run by Run Control of Chemical-Mechanical Polishing.'' IEEE Transactions on Components, Packaging, and Manufacturing Technology C, Vol. 19, No. 4, pp. 307-314, Oct. 1996.

  2. R. Telfeyan, J. Moyne, N. Chaudhry, J. Pugmire, S. Shellman, D. Boning, W. Moyne, A. Hurwitz, and J. Taylor (1996). ``A Multi-Level Approach to the Control of a Chemical-Mechanical Planarization Process.'' Journal of Vacuum Science and Technology A, Vol. 14, No. 3 (May/June 1996), pp. 1907 - 1913.

  3. J. Moyne, R. Telfeyan, A. Hurwitz, J. Taylor (1995). ``A Process-Independent Run-to-Run Controller and its Application to Chemical-Mechanical Planarization.'' Proceedings of the Sixth Annual SEMI/IEEE ASMC, Boston, (October 1995).

  4. R. Telfeyan, J. Moyne, A. Hurwitz, J. Taylor (1995). ``Demonstration of a Process-Independent Run-to-Run Controller.'' Proceedings of the 187th Meeting of the Electrochemical Society, May 1995.

  5. J. Moyne, N. Chaudhry, R. Telfeyan (1995). ``Adaptive Extensions to a Multi-Branch Run-to-Run Controller for Plasma Etching.'' Journal of Vacuum Science and Technology A, Vol. 13, No. 3 (May/June 1995), pp. 1787 - 1791.

  6. N. Chaudhry, R. Telfeyan, B. Moore, H. Etemad, J. Moyne (1993). ``A Run-to-Run Control Framework for VLSI Manufacturing.'' TECHCON '93, Atlanta, GA, September 26 - 29, 1993, 31 - 33.

  7. R. Telfeyan (1993). ``Demystifying Cyberspace Communication.'' Proceedings of the Tenth International Conference on Technology & Education. MIT, Cambridge, March 21 - 24, 1993.

  8. R. Telfeyan, J. Bello (1979). ``Anticipated Carcinogenesis of N- methyl-N'-nitro-N-nitrosoguanidine (MNNG): Crosslinks Between Nucleohistones and DNA.'' Roswell Park Cancer Institute, Buffalo.

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